Fuzzy Positioning Control of the Novel Single-Axis Piezoelectric Actuated Stage

In this research, we used the self-designed piezoelectric actuated stage to achieve the nanometer level precise positioning control through the design of the fuzzy controller. A novel piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive the stage. The movement of the piezoelectric actuated stage is read and analyzed by means of NI PCI-6115 data acquisition card and Lab VIEW software operating in conjunction with a linear encoder. The new consideration of tuning time T_on is used to place of traditional method of changing the magnitude of driving voltage to control the stepping distance of the stage. Under a constant driving voltage, the stride of the stage increases with time T_on, and the stride of the stage decreases with time T_on. According to the control experiment, the piezoelectric actuator stage would be reached below 1 μm levels by the fuzzy controller which is designed for this experiment, has been demonstrated. Furthermore, the purpose of control could be achieved by changing the time T_on which has been demonstrated.