Title :
Hybrid integration of VCSELs and microlenses for a particle detection microoptical system
Author :
Bernat, I. ; Moreno, M. ; Gonzalez-Murillo, J.J. ; Romano-Rodriguez, A. ; Fonseca, Luis
Author_Institution :
Dept. de Electron., Univ. de Barcelona, Barcelona, Spain
Abstract :
We introduce the design and fabrication of a microoptical system of reduced dimensions, based on hybrid integration of commercial components (i.e. VCSELs and microlenses) through silicon micromachining. We demonstrate the feasibility of integrating these components with the aim of providing up to 4 collimated or focused laser beams. The application for this system will be the detection of microparticles in a 4 parallel measurement process.
Keywords :
elemental semiconductors; integrated optics; laser beams; laser cavity resonators; microlenses; micromachining; optical fabrication; particle detectors; silicon; surface emitting lasers; Si; VCSEL; hybrid integration; microlenses; microparticles; particle detection microoptical system; reduced dimensions; silicon micromachining; Electron devices; Electron optics; Lenses; Microchannels; Microoptics; Optical device fabrication; Stimulated emission; VCSEL; flow cytometry; microlens; silicon micromachining;
Conference_Titel :
Electron Devices (CDE), 2015 10th Spanish Conference on
Conference_Location :
Madrid
DOI :
10.1109/CDE.2015.7087495
