Title :
Model and Simulation of Evolutionary Algorithms for Probing Carbon Nitride Films
Author_Institution :
Inst. of Mechatron. Sci. & Technol, Yung -Ta Inst. of Technol. & Commerce, Ping-Tung, Taiwan
Abstract :
An evolutionary algorithm was used to model and characterize the tribological behaviors of diamond-like carbon (DLC) films deposited by an-unbalanced magnetron. An orthogonal array experiment with carbon nitride multi layer films, with and without Zr additives is introduced and the effects of deposited parameters were systematically explored. The surface properties, such wear properties were measured and modeled comparatively. In this study, the HTGA computations for DLC multi layer films are performed to show significant improvements can be obtained and a satisfactory performance has been achieved. The predicted values and experimental results are close within the experimental domains, thereby justifying the reliability and feasibility of the approach.
Keywords :
Taguchi methods; additives; carbon compounds; diamond-like carbon; films; genetic algorithms; magnetrons; reliability; sputter deposition; tribology; wear; zirconium; DLC multilayer films; HTGA computations; carbon nitride multilayer films; diamond-like carbon films; evolutionary algorithm simulation; hybrid Taguchi-genetic algorithms; orthogonal array experiment; surface properties; tribological behaviors; unbalanced magnetron; wear properties; zirconium additives; Arrays; Coatings; Diamond-like carbon; Films; Fuzzy logic; Genetic algorithms; Nonhomogeneous media; Evolutionary algorithm; diamond-like carbon and hybrid Taguchi-genetic algorithms (HTGA); tribological behaviors;
Conference_Titel :
Computer, Consumer and Control (IS3C), 2012 International Symposium on
Conference_Location :
Taichung
Print_ISBN :
978-1-4673-0767-3
DOI :
10.1109/IS3C.2012.234