High Q-factor Ku band inductor using Cylindrical Radial Superlattice conductor and air-lifted architecture

Microwave air-lifted inductors with high quality factor are presented with the Cylindrical Radial Superlattice (CRS) structure utilized as the low-loss conductor. The superlattice structure composed of alternating nonmagnetic/magnetic layers is used to fabricate low radio frequency ohmic-loss inductors. A gold wire bond is used as the structural core while electroplated copper/permalloy (Ni₈₀Fe₂₀) with 400nm/160nm thickness, respectively, is used to realize the superlattice structure. Also, an ultra-wide band high Q-factor inductor and its implementation is demonstrated. The simulation and measurement results prove the effectiveness of employing CRS structure to get high performance low loss passive devices.