• DocumentCode
    2466281
  • Title

    High-current processing of microfabricated field emitters for enhanced emission uniformity and high-current-density operation

  • Author

    Schwoebel, P.R. ; Spindt, C.A. ; Holland, C.E.

  • Author_Institution
    Appl. Phys. Sci. Lab., SRI Int., Menlo Park, CA, USA
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    65
  • Lastpage
    66
  • Abstract
    We have shown that in situ tip self-heating by the emitted electron current can be used to make the current-voltage characteristics of microfabricated field emitter tips nearly identical to one another. The resulting improved emission uniformity could make it possible to realize the full potential of field-emission cathodes to produce current densities of the order of 103-104 amps/cm2 averaged over the area occupied by an array.
  • Keywords
    cathodes; electron field emission; vacuum microelectronics; current density; current-voltage characteristics; emission uniformity; field emission cathode; field emitter array; high-current processing; microfabrication; tip self-heating; Annealing; Cathodes; Current density; Current-voltage characteristics; Electron emission; Laboratories; Surface cleaning; Surface contamination; Surface topography; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference, 2002. IVEC 2002. Third IEEE International
  • Print_ISBN
    0-7803-7256-5
  • Type

    conf

  • DOI
    10.1109/IVELEC.2002.999263
  • Filename
    999263
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2466281