Title :
SAW Resonators Above 2 GHz with Low Loss, High Q
Author :
Pendergrass, L.L. ; Studebaker, L.G.
Keywords :
Electron beams; Fabrication; Frequency; Insertion loss; Lithography; Loss measurement; Microwave technology; Optical resonators; Surface acoustic waves; Throughput;
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
DOI :
10.1109/ULTSYM.1986.198747