DocumentCode
2466416
Title
SAW Resonators Above 2 GHz with Low Loss, High Q
Author
Pendergrass, L.L. ; Studebaker, L.G.
fYear
1986
fDate
17-19 Nov. 1986
Firstpage
251
Lastpage
256
Keywords
Electron beams; Fabrication; Frequency; Insertion loss; Lithography; Loss measurement; Microwave technology; Optical resonators; Surface acoustic waves; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1986 Ultrasonics Symposium
Conference_Location
Williamsburg, VA, USA
Type
conf
DOI
10.1109/ULTSYM.1986.198747
Filename
1535687
Link To Document