Title :
Mechanical characterization of neural electrodes based on PDMS-parylene C-PDMS sandwiched system
Author :
Henle, C. ; Hassler, C. ; Kohler, F. ; Schuettler, M. ; Stieglitz, T.
Author_Institution :
Laboratory for Biomedical Microtechnology, Department of Microsystems Engineering, University of Freiburg, Germany
fDate :
Aug. 30 2011-Sept. 3 2011
Abstract :
Manufacturing of neural electrodes based on metal foil and silicone rubber using a laser is a simple and promising method. A handicap of such electrode arrays is the mechanical robustness of the thin metal tracks that connect the electrode sites with the interconnection pads. Embedding of structured parylene C foil in silicone rubber turned out to be an interesting method to increase the robustness. Test samples with 12.5 μm thick platinum tracks and a 15 μm thick embedded and RIE-structured parylene C foil showed more than 800 % higher ultimate strength until breakage of the tracks. Different structured parylene C foil showed increasing robustness with increasing hole-spacing.
Keywords :
Electrodes; Lasers; Materials; Platinum; Robustness; Rubber; Action Potentials; Animals; Biocompatible Materials; Dimethylpolysiloxanes; Elastic Modulus; Electrodes; Equipment Design; Equipment Failure Analysis; Humans; Neurons; Nylons; Tensile Strength;
Conference_Titel :
Engineering in Medicine and Biology Society, EMBC, 2011 Annual International Conference of the IEEE
Conference_Location :
Boston, MA
Print_ISBN :
978-1-4244-4121-1
Electronic_ISBN :
1557-170X
DOI :
10.1109/IEMBS.2011.6090142
