Title :
GaN photodetectors prepared on silicon and sapphire substrates
Author :
Chang, S.P. ; Chang, S.J. ; Lu, C.Y. ; Chuang, R.W.
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan
Abstract :
GaN ultraviolet metal-semiconductor-metal photodetectors (PDs) grown on Si and sapphire substrates were prepared. It was found that dark currents of PDs prepared on Si substrates were much smaller than that prepared on sapphire substrate. With an incident wavelength of 355 nm and an applied bias of 5 V, it was found that peak responsivities were 0.016 and 0.074 A/W while rejection ratios (i.e. 355 nm : 425 nm) were 2100 and 420 for u-GaN on Si and u-GaN on sapphire, respectively. The corresponding D* were 1.73times1010 and 1.08times109 cmHz0.5W-1, respectively.
Keywords :
elemental semiconductors; metal-semiconductor-metal structures; photodetectors; sapphire; silicon; GaN; dark currents; sapphire substrates; silicon substrates; ultraviolet metal-semiconductor-metal photodetectors; voltage 5 V; wavelength 355 nm; wavelength 425 nm; Aluminum gallium nitride; Annealing; Capacitive sensors; Epitaxial layers; Gallium nitride; Microelectronics; Photodetectors; Silicon carbide; Substrates; Thermal conductivity;
Conference_Titel :
Electron Devices and Solid-State Circuits, 2008. EDSSC 2008. IEEE International Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-2539-6
Electronic_ISBN :
978-1-4244-2540-2
DOI :
10.1109/EDSSC.2008.4760697