Title :
Noncontact Observation of Microdefects in N-GaAs Wafers by Photo-Thermal-Radiation and Photoluminescence Microscopy
Author :
Mikoshiba, N. ; Akutsu, Y. ; Nakamura, H. ; Tsubouchi, K. ; Hosokawa, M.
Keywords :
Annealing; Gallium arsenide; Infrared detectors; Microscopy; Mirrors; Photoluminescence; Pulse measurements; Radiation detectors; Surface emitting lasers; Wavelength measurement;
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
DOI :
10.1109/ULTSYM.1986.198786