DocumentCode :
2467217
Title :
NEMS based on top-down technologies: from stand-alone NEMS to VLSI NEMS & NEMS-CMOS integration
Author :
Ollier, E. ; Andreucci, P. ; Duraffourg, L. ; Colinet, E. ; Durand, C. ; Casset, F. ; Ernst, T. ; Hentz, S. ; Labarthe, S. ; Marcoux, C. ; Nguyen, V. ; Renaud, D. ; Mile, E. ; Renaux, P. ; Mercier, D. ; Robert, P. ; Ancey, P. ; Bouchaillot, L.
Author_Institution :
CEA-LETI MINATEC, Grenoble
fYear :
2008
fDate :
8-10 Dec. 2008
Firstpage :
1
Lastpage :
6
Abstract :
This paper reviews some recent advances related to NEMS based on top-down technologies: from stand-alone NEMS to VLSI NEMS and NEMS-CMOS integration.
Keywords :
CMOS integrated circuits; VLSI; nanoelectromechanical devices; NEMS based on top-down technologies; NEMS-CMOS integration; VLSI NEMS; nano-electro-mechanical systems; stand-alone NEMS; Biosensors; CMOS technology; Costs; Force measurement; Nanoelectromechanical systems; Oscillators; Radio frequency; Resonant frequency; Sensor arrays; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices and Solid-State Circuits, 2008. EDSSC 2008. IEEE International Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-2539-6
Electronic_ISBN :
978-1-4244-2540-2
Type :
conf
DOI :
10.1109/EDSSC.2008.4760714
Filename :
4760714
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2467217
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