• DocumentCode
    2467325
  • Title

    Electronic system for control of a thermally actuated alignment device

  • Author

    Yang, Ruimin ; Van Schieveen, Jeroen ; Nihtianov, Stoyan ; Spronck, Jo W.

  • Author_Institution
    Dept. of Microelectron., Delft Univ. of Technol., Delft, Netherlands
  • fYear
    2010
  • fDate
    14-17 March 2010
  • Firstpage
    1581
  • Lastpage
    1586
  • Abstract
    This article presents the design of an electronic system that is used to control a thermally actuated alignment device. This device is ideal for aligning critical parts in complex, high-precision systems, like, for example, optical elements or the electrodes of capacitive sensors. Accurate temperature control of the thermal elements improves the performance of the alignment in terms of positioning accuracy and operating speed. Furthermore, the article presents the realized test setup and the initial measurement results. The measurement results show the benefits of the new controller.
  • Keywords
    capacitive sensors; electrodes; temperature control; accurate temperature control; capacitive sensors electrodes; controller; electronic system design; initial measurement results; optical elements; positioning accuracy; thermally actuated alignment device control; Actuators; Capacitive sensors; Clamps; Control systems; Cooling; Costs; Heating; Temperature control; Thermal engineering; Thermal lensing; Thermal actuation; auto-aligment; electronic control system; smart sensor; thermal stepper;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industrial Technology (ICIT), 2010 IEEE International Conference on
  • Conference_Location
    Vi a del Mar
  • Print_ISBN
    978-1-4244-5695-6
  • Electronic_ISBN
    978-1-4244-5696-3
  • Type

    conf

  • DOI
    10.1109/ICIT.2010.5472453
  • Filename
    5472453