DocumentCode
2467325
Title
Electronic system for control of a thermally actuated alignment device
Author
Yang, Ruimin ; Van Schieveen, Jeroen ; Nihtianov, Stoyan ; Spronck, Jo W.
Author_Institution
Dept. of Microelectron., Delft Univ. of Technol., Delft, Netherlands
fYear
2010
fDate
14-17 March 2010
Firstpage
1581
Lastpage
1586
Abstract
This article presents the design of an electronic system that is used to control a thermally actuated alignment device. This device is ideal for aligning critical parts in complex, high-precision systems, like, for example, optical elements or the electrodes of capacitive sensors. Accurate temperature control of the thermal elements improves the performance of the alignment in terms of positioning accuracy and operating speed. Furthermore, the article presents the realized test setup and the initial measurement results. The measurement results show the benefits of the new controller.
Keywords
capacitive sensors; electrodes; temperature control; accurate temperature control; capacitive sensors electrodes; controller; electronic system design; initial measurement results; optical elements; positioning accuracy; thermally actuated alignment device control; Actuators; Capacitive sensors; Clamps; Control systems; Cooling; Costs; Heating; Temperature control; Thermal engineering; Thermal lensing; Thermal actuation; auto-aligment; electronic control system; smart sensor; thermal stepper;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Technology (ICIT), 2010 IEEE International Conference on
Conference_Location
Vi a del Mar
Print_ISBN
978-1-4244-5695-6
Electronic_ISBN
978-1-4244-5696-3
Type
conf
DOI
10.1109/ICIT.2010.5472453
Filename
5472453
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