Title :
Ultrasonic Phased Array Transducer for Acoustic Imaging in Air
Author :
Higuch, K. ; Suzuki, K. ; Tanigawa, H.
Keywords :
Acoustic arrays; Acoustic imaging; Acoustic transducers; Electrodes; Microphones; Orifices; Phased arrays; Silicon; Ultrasonic transducer arrays; Ultrasonic transducers;
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
DOI :
10.1109/ULTSYM.1986.198800