DocumentCode :
2467696
Title :
Thin film characterization by acoustic emission monitoring of nanoindentation
Author :
Daugela, A. ; Wyrobek, J.T.
Author_Institution :
Hysitron Inc.
fYear :
2000
fDate :
9-13 April 2000
Firstpage :
581
Lastpage :
581
Keywords :
Acoustic emission; Acoustic propagation; Adaptive filters; Filtering; Monitoring; Signal processing; Substrates; Surface acoustic waves; Time frequency analysis; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 2000. INTERMAG 2000 Digest of Technical Papers. 2000 IEEE International
Conference_Location :
Toronto, ON, Canada
Print_ISBN :
0-7803-5943-7
Type :
conf
DOI :
10.1109/INTMAG.2000.872356
Filename :
872356
Link To Document :
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