Title :
Thin film characterization by acoustic emission monitoring of nanoindentation
Author :
Daugela, A. ; Wyrobek, J.T.
Author_Institution :
Hysitron Inc.
Keywords :
Acoustic emission; Acoustic propagation; Adaptive filters; Filtering; Monitoring; Signal processing; Substrates; Surface acoustic waves; Time frequency analysis; Transistors;
Conference_Titel :
Magnetics Conference, 2000. INTERMAG 2000 Digest of Technical Papers. 2000 IEEE International
Conference_Location :
Toronto, ON, Canada
Print_ISBN :
0-7803-5943-7
DOI :
10.1109/INTMAG.2000.872356