Title :
Cu-doped V2O5 film as anode in V2O5 / LiPON / LiCoO2 Lithium Microbattery
Author :
Zhang, Liangtang ; Song, Jie ; Dong, Quanfeng ; Wu, Suntao
Author_Institution :
Dept. of Mech. & Electr. Eng., Xiamen Univ., Xiamen, China
Abstract :
The V2O5 and CuxV2O5 films as the anode of V2O5/LiPON / LiCoO2 lithium microbatteries were prepared by RF magnetron sputtering method. The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The films´ structures, surface morphologies, and composition were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS). The microbatteries´ cyclic voltammetry and galvanostatic cell cycling measurements were performed. The undoped V2O5 microbattery has capacity of 7.3 nAh in the potential range of 0- 3.0 V, while the Cu-doped V2O5 microbattery exhibits better capacity of 9.5 nAh.
Keywords :
X-ray diffraction; X-ray photoelectron spectra; copper; doping; electrochemical electrodes; microfabrication; micromechanical devices; scanning electron microscopy; secondary cells; sputtering; voltammetry (chemical analysis); CuxV2O5; MEMS; RF magnetron sputtering method; X-ray diffraction; X-ray photoelectron spectroscopy; anode; cyclic voltammetry; film doping; galvanostatic cell cycling measurements; lithium microbattery; microelectromechanical system; microfabrication; scanning electron microscopy; surface morphologies; voltage 0 V to 3.0 V; Anodes; Copper; Films; Lithium; Sputtering; Substrates; Surface morphology; Copper doped vanadium oxide; Electrochemical performance; RF magnetron sputtering; Thin film microbattery;
Conference_Titel :
Remote Sensing, Environment and Transportation Engineering (RSETE), 2011 International Conference on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-9172-8
DOI :
10.1109/RSETE.2011.5965685
