Cu-doped V2O5 film as anode in V2O5 / LiPON / LiCoO2 Lithium Microbattery

The V₂O₅ and Cu_xV₂O₅ films as the anode of V₂O₅/LiPON / LiCoO₂ lithium microbatteries were prepared by RF magnetron sputtering method. The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The films´ structures, surface morphologies, and composition were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS). The microbatteries´ cyclic voltammetry and galvanostatic cell cycling measurements were performed. The undoped V₂O₅ microbattery has capacity of 7.3 nAh in the potential range of 0- 3.0 V, while the Cu-doped V₂O₅ microbattery exhibits better capacity of 9.5 nAh.