DocumentCode
2468204
Title
Application of Line-Focus-Beam Acoustic Microscope to Inhomogeneity Detection on SAW Device Materials
Author
Kushibiki, J. ; Asano, H. ; Ueda, T. ; Chubachi, N.
fYear
1986
fDate
17-19 Nov. 1986
Firstpage
749
Lastpage
754
Keywords
Acoustic applications; Acoustic devices; Acoustic materials; Acoustic measurements; Acoustic pulses; Acoustic signal detection; Lenses; Microscopy; Optical materials; Surface acoustic wave devices;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1986 Ultrasonics Symposium
Conference_Location
Williamsburg, VA, USA
Type
conf
DOI
10.1109/ULTSYM.1986.198835
Filename
1535775
Link To Document