Title :
W-band Silicon dielectric measurement
Author :
Seyyed-Esfahlan, Mehdi ; Nemati, M.H. ; Tekin, Ibrahim
Author_Institution :
Electron. Eng., Sabanci Univ., Istanbul, Turkey
Abstract :
In this paper, a free space based method for measurement of silicon dielectric constant is presented at W band frequencies. The dielectric constant of silicon is calculated using measured phase information of the transmitted signal (S21) through Silicon sheet of 500um thickness. Measured dielectric constant for silicon wafer has numerous fluctuations which come from multiple reflection and diffraction effect due to sharp edges.
Keywords :
elemental semiconductors; permittivity measurement; phase measurement; silicon; Si; W-band silicon dielectric constant measurement; diffraction effect; free space based method; multiple reflection effect; phase information measurement; signal transmission; size 500 mum; Antenna measurements; Dielectric constant; Frequency measurement; Permittivity measurement; Reflection; Silicon;
Conference_Titel :
Antennas and Propagation Society International Symposium (APSURSI), 2014 IEEE
Conference_Location :
Memphis, TN
Print_ISBN :
978-1-4799-3538-3
DOI :
10.1109/APS.2014.6904787
