DocumentCode :
2469375
Title :
An Instrument for Layer Thickness Measurement Using Pseudo-Sezawa Waves
Author :
Tsukahara, Yusuke ; Nakaso, Noritaka ; Kushibiki, Jun-ichi ; Chubachi, Noriyoshi
fYear :
1986
fDate :
17-19 Nov. 1986
Firstpage :
1031
Lastpage :
1036
Keywords :
Displacement measurement; Gold; Instruments; Mechanical sensors; Semiconductor device measurement; Stability; Surface waves; Temperature measurement; Thickness measurement; Time measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1986.198894
Filename :
1535834
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2469375
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