• DocumentCode
    2469375
  • Title

    An Instrument for Layer Thickness Measurement Using Pseudo-Sezawa Waves

  • Author

    Tsukahara, Yusuke ; Nakaso, Noritaka ; Kushibiki, Jun-ichi ; Chubachi, Noriyoshi

  • fYear
    1986
  • fDate
    17-19 Nov. 1986
  • Firstpage
    1031
  • Lastpage
    1036
  • Keywords
    Displacement measurement; Gold; Instruments; Mechanical sensors; Semiconductor device measurement; Stability; Surface waves; Temperature measurement; Thickness measurement; Time measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE 1986 Ultrasonics Symposium
  • Conference_Location
    Williamsburg, VA, USA
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1986.198894
  • Filename
    1535834
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2469375