Title :
Coplanar waveguide technique for measurement of dielectric constant or thickness of dielectric films
Author :
Waldo, M.K. ; Kaufman, I. ; El-Ghazaly, S.
Author_Institution :
Motorola Inc., Scottsdale, AZ, USA
Abstract :
This paper presents results of an investigation aimed at using a coplanar waveguide resonator for virtually instantaneous measurement of the thickness or dielectric constant of insulating films on an open structure. Among possible applications are process monitoring, measurement of liquid films, and the detection of thin ice deposits on aircraft surfaces.
Keywords :
coplanar waveguides; dielectric thin films; microwave measurement; permittivity measurement; thickness measurement; aircraft surface; coplanar waveguide resonator; dielectric constant measurement; dielectric film; ice deposit detection; insulating film; liquid film; open structure; process monitoring; thickness measurement; Aircraft; Coplanar waveguides; Dielectric constant; Dielectric measurements; Dielectric thin films; Dielectrics and electrical insulation; Ice surface; Ice thickness; Monitoring; Thickness measurement;
Conference_Titel :
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location :
Denver, CO, USA
Print_ISBN :
0-7803-3814-6
DOI :
10.1109/MWSYM.1997.596576
