DocumentCode
2469524
Title
Coplanar waveguide technique for measurement of dielectric constant or thickness of dielectric films
Author
Waldo, M.K. ; Kaufman, I. ; El-Ghazaly, S.
Author_Institution
Motorola Inc., Scottsdale, AZ, USA
Volume
3
fYear
1997
fDate
8-13 June 1997
Firstpage
1339
Abstract
This paper presents results of an investigation aimed at using a coplanar waveguide resonator for virtually instantaneous measurement of the thickness or dielectric constant of insulating films on an open structure. Among possible applications are process monitoring, measurement of liquid films, and the detection of thin ice deposits on aircraft surfaces.
Keywords
coplanar waveguides; dielectric thin films; microwave measurement; permittivity measurement; thickness measurement; aircraft surface; coplanar waveguide resonator; dielectric constant measurement; dielectric film; ice deposit detection; insulating film; liquid film; open structure; process monitoring; thickness measurement; Aircraft; Coplanar waveguides; Dielectric constant; Dielectric measurements; Dielectric thin films; Dielectrics and electrical insulation; Ice surface; Ice thickness; Monitoring; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location
Denver, CO, USA
ISSN
0149-645X
Print_ISBN
0-7803-3814-6
Type
conf
DOI
10.1109/MWSYM.1997.596576
Filename
596576
Link To Document