Title :
Films and electronic devices fabricated from high-T/sub c/ superconductors
Author :
Laibowitz, R.B. ; Koch, R.H. ; Sandstrom, R.L. ; Gallagher, W.J.
Author_Institution :
IBM Res. Div., Yorktown Heights, NY, USA
Abstract :
Films and electronic devices fabricated from high-T/sub c/ superconductors are briefly reviewed. Present work being done in the field is highlighted. Substrate materials, sputtering techniques, oxygen incorporation, and fabrication of the films are covered.<>
Keywords :
high-temperature superconductors; reviews; O/sub 2/ incorporation; electronic devices; fabrication; films; high-T/sub c/ superconductors; sputtering techniques; substrate materials; Laser ablation; Lithography; Milling; Nitrogen; Plasmas; SQUIDs; Superconducting devices; Superconducting films; Superconductivity; Temperature;
Conference_Titel :
Electronics Components Conference, 1988., Proceedings of the 38th
Conference_Location :
Los Angeles, CA, USA
DOI :
10.1109/ECC.1988.12585
