Title :
Simplified fabrication of polyimide waveguide grating using synchrotron radiation irradiation
Author :
Kobayashi, Junya ; Maruno, Tohru ; Ishii, Tetsuyoshi ; Tamamura, Toshiaki
Author_Institution :
NTT Opto-Electron. Labs., Tokyo, Japan
Abstract :
We propose a simple process for fabricating a polymer grating by irradiating a synchrotron radiation (SR) beam having a small divergence to the channel waveguide, and describe the characteristics of the fabricated grating. We used fluorinated polyimide with constant birefringence as the waveguide material
Keywords :
Bragg gratings; diffraction gratings; optical fabrication; optical polymers; optical waveguides; synchrotron radiation; channel waveguide; constant birefringence; fabricated grating; fluorinated polyimide; polyimide waveguide grating; synchrotron radiation beam; synchrotron radiation irradiation; waveguide material; Coatings; Etching; Gratings; Optical device fabrication; Optical modulation; Polyimides; Resists; Strontium; Synchrotron radiation; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.739435
