DocumentCode
2470230
Title
Simplified fabrication of polyimide waveguide grating using synchrotron radiation irradiation
Author
Kobayashi, Junya ; Maruno, Tohru ; Ishii, Tetsuyoshi ; Tamamura, Toshiaki
Author_Institution
NTT Opto-Electron. Labs., Tokyo, Japan
Volume
2
fYear
1998
fDate
3-4 Dec 1998
Firstpage
11
Abstract
We propose a simple process for fabricating a polymer grating by irradiating a synchrotron radiation (SR) beam having a small divergence to the channel waveguide, and describe the characteristics of the fabricated grating. We used fluorinated polyimide with constant birefringence as the waveguide material
Keywords
Bragg gratings; diffraction gratings; optical fabrication; optical polymers; optical waveguides; synchrotron radiation; channel waveguide; constant birefringence; fabricated grating; fluorinated polyimide; polyimide waveguide grating; synchrotron radiation beam; synchrotron radiation irradiation; waveguide material; Coatings; Etching; Gratings; Optical device fabrication; Optical modulation; Polyimides; Resists; Strontium; Synchrotron radiation; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location
Orlando, FL
Print_ISBN
0-7803-4947-4
Type
conf
DOI
10.1109/LEOS.1998.739435
Filename
739435
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