Title :
Monolithically integrated VCSELs and photodetectors for microsystem applications
Author :
Geib, K.M. ; Choquette, K.D. ; Allerman, A. ; Hindi, J.J. ; Nevers, J. ; Hammous, B.E.
Author_Institution :
Center for Compound Semicond. Technol., Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
Summary form only given. We have fabricated integrated resonated cavity photodetectors with selectively oxidized VCSELs by etching away a portion of the top distributed Bragg reflector mirror of nominally 850 nm VCSEL lasers
Keywords :
etching; integrated optics; optical resonators; photodetectors; etching; integrated resonated cavity photodetectors; microsystem applications; monolithically integrated VCSELs; nm VCSEL lasers; photodetectors; selectively oxidized VCSELs; top distributed Bragg reflector mirror; Apertures; Etching; Laboratories; Laser modes; Mirrors; Optical surface waves; Photoconductivity; Photodetectors; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.739443
