Title :
Oxidation of III-V semiconductors for novel optoelectronic applications
Author :
Blum, O. ; Sutlivan, C. ; Raymond, T.D. ; Alford, W.J. ; Smith, A.V. ; Reno, J.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
Summary form only given. We discuss the use of oxides in semiconductor optical waveguides and the challenges associated with design, growth and fabrication of such waveguides. We show a cross sectional scanning electron microscope view of a partially oxidized waveguide, and we show modal losses of various width waveguides for fully oxidized, partially oxidized and unoxidized cases. Applications to PIC technology, nonlinear wave mixing in oxide/semiconductor waveguides and edge emitting lasers will be discussed
Keywords :
III-V semiconductors; optical design techniques; optical fabrication; optical planar waveguides; scanning electron microscopy; semiconductor growth; III-V semiconductors; PIC technology; edge emitting lasers; fully oxidized; nonlinear wave mixing; optical waveguide design; optical waveguide fabrication; optical waveguides; optoelectronic applications; partially oxidized; Electron optics; III-V semiconductor materials; Integrated optics; Nonlinear optics; Optical design; Optical mixing; Optical waveguide components; Optical waveguides; Oxidation; Semiconductor waveguides;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.739447
