Sulfuric acid corrosion of ITO surface for improvement of the optical properties

Author

Xu, Xinwei ; Cui, Bifeng ; Guo, Weiling ; Zhu, Yanxu ; Cui, Desheng

Author_Institution

Key Lab. of Opto-Electron. Technol., Beijing Univ. of Technol., Beijing, China

fYear

2011

fDate

24-26 June 2011

Firstpage

6396

Lastpage

6398

Abstract

After the surface treatment with concentrate sulfuric acid, the sheet resistance of ITO layer is unchanged, while the surface roughness increased. When the 70-100nm ITO layer is eroded by the concentrate sulfuric acid for 480 seconds, its reflectivity decreased and the transmittance significantly increased. It can improve the optical properties of the LED devices.

Keywords

corrosion; electric resistance; indium compounds; light emitting diodes; reflectivity; semiconductor materials; surface roughness; surface treatment; tin compounds; ITO; ITO layer; ITO surface; LED devices; concentrate sulfuric acid; erosion; optical properties; reflectivity; sheet resistance; size 70 nm to 100 nm; sulfuric acid corrosion; surface roughness; surface treatment; time 480 s; transmittance; Corrosion; Films; Indium tin oxide; Light emitting diodes; Optical reflection; Rough surfaces; Surface morphology; ITO; corrosion; optical properties; sulfuric acid;

fLanguage

English

Publisher

ieee

Conference_Titel

Remote Sensing, Environment and Transportation Engineering (RSETE), 2011 International Conference on

Conference_Location

Nanjing

Print_ISBN

978-1-4244-9172-8

Type

conf

DOI

10.1109/RSETE.2011.5965820

Filename

5965820