Reverse ridge, large profile of single mode PLZT film waveguide and its Mach-Zehnder E-O modulator

Author

Jin, G.-H. ; Zou, Y.K. ; Fuflyigin, V. ; Liu, S.-W. ; Lu, Y.L. ; Zhao, J. ; Cronin-Golomb, M.

Author_Institution

Center of Electro-Opt Technol., Tufts Univ., Medford, MA, USA

Volume

2

fYear

1998

fDate

3-4 Dec 1998

Firstpage

79

Abstract

We report the relatively low loss and large cross-section single mode PLZT film waveguide as well as its MZ type of an electro optic waveguide modulator. The reverse ridge waveguide was fabricated by first depositing an ITO thin film on an r-cut sapphire substrate. The ITO thickness was chosen to be in the range of submicrometer, as determined by a modefield

Keywords

electro-optical modulation; integrated optics; lanthanum compounds; lead compounds; optical fabrication; optical films; optical waveguides; ITO; ITO thickness; InSnO; Mach-Zehnder E-O modulator; PLZT; PbLaZrO3TiO3; electro optic waveguide modulator; large cross-section single mode PLZT film waveguide; large profile; low loss; modefield; r-cut sapphire substrate; reverse ridge; reverse ridge waveguide; single mode PLZT film waveguide; Electrodes; Intensity modulation; Optical beam splitting; Optical films; Optical modulation; Optical scattering; Optical waveguides; Substrates; Transistors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE

Conference_Location

Orlando, FL

Print_ISBN

0-7803-4947-4

Type

conf

DOI

10.1109/LEOS.1998.739469

Filename

739469