DocumentCode
2471013
Title
A 400MHz One-Chip Oscillator Using an Air-Gap Type Thin Film Resonator
Author
Satoh, Hiroaki ; Suzuki, Hitoshi ; Takahashi, Chikau ; Narahara, Chouji ; Ebata, Yasuo
fYear
1987
fDate
14-16 Oct. 1987
Firstpage
363
Lastpage
368
Keywords
Air gaps; Dielectric thin films; Fabrication; Oscillators; Passivation; Piezoelectric films; Semiconductor films; Thin film circuits; Thin film devices; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1987 Ultrasonics Symposium
Conference_Location
Denver, Colorado, USA
Type
conf
DOI
10.1109/ULTSYM.1987.198984
Filename
1535924
Link To Document