Title :
Quantitative Effects of Substrate Tilt, Curvature and Deposition Position on Orientation in ZnO Films
Author :
Howell, D. ; Goddard, L. ; Khuri-Yakub, B.T.
Keywords :
Cathodes; Laboratories; Optical fiber devices; Optical films; Optical surface waves; Sputtering; Substrates; Transducers; X-ray diffraction; Zinc oxide;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.198987