Title :
Advances in Structure and Fabrication Process for Thin Film Acoustic Resonator
Author :
Miyasaka, Yoichi ; Hoshino, Shigeki ; Takahashi, Sadayuki
Keywords :
Biomembranes; Etching; Fabrication; Piezoelectric films; Resonance; Rough surfaces; Substrates; Temperature; Transistors; Zinc oxide;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.198988
