DocumentCode
2471202
Title
New Air Gap Type Piezoelectric Composite Thin Film Resonators
Author
Yamanouchi, K. ; Oba, M.
fYear
1987
fDate
14-16 Oct. 1987
Firstpage
415
Lastpage
418
Keywords
Electrodes; Etching; Piezoelectric films; Residual stresses; Semiconductor films; Semiconductor thin films; Thin film circuits; Thin film devices; Transistors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1987 Ultrasonics Symposium
Conference_Location
Denver, Colorado, USA
Type
conf
DOI
10.1109/ULTSYM.1987.198993
Filename
1535933
Link To Document