DocumentCode
2471215
Title
Evolutionary design optimization of MEMS: A brief review
Author
Zhu, Haoshen ; Wang, Pan ; Fan, Zhun
Author_Institution
Wuhan Univ. of Technol., Wuhan, China
fYear
2010
fDate
14-17 March 2010
Firstpage
1683
Lastpage
1687
Abstract
The limitations of the conventional automated design tools for Micro-Electro-Mechanical-Systems (MEMS) design optimization (DO) are discussed in this paper. In order to overcome these difficulties, a recent trend in DO of MEMS is inspired by the natural evolution mechanism. Various techniques, especially the evolutionary computation (EC), have been adopted for the DO of MEMS. This paper presents a review of the achievements in this infant research area which utilizes EC methods for the DO of MEMS and points out the challenges that it is facing.
Keywords
evolutionary computation; micromechanical devices; optimisation; MEMS design; automated design tools; evolutionary computation; evolutionary design optimization; micro-electro-mechanical-systems design optimization; natural evolution mechanism; Algorithm design and analysis; Design automation; Design optimization; Evolutionary computation; Microelectromechanical devices; Micromechanical devices; NASA; Optimization methods; Space technology; Stochastic processes;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Technology (ICIT), 2010 IEEE International Conference on
Conference_Location
Vi a del Mar
Print_ISBN
978-1-4244-5695-6
Electronic_ISBN
978-1-4244-5696-3
Type
conf
DOI
10.1109/ICIT.2010.5472635
Filename
5472635
Link To Document