Control-oriented modelling of an experimental Ar-O2 plasma process

Author

Iordanov, Petar ; Ringwood, John

Author_Institution

Dept. of Electron. & Comput. Eng., Univ. of Limerick, Limerick, Ireland

fYear

2010

fDate

14-17 March 2010

Firstpage

82

Lastpage

87

Abstract

Development of a control-oriented model of an experimental plasma reactor is presented in this paper. The model structure is suitably partitioned in order to facilitate any subsequent control design. In the model, the linear dynamical part is conveniently separated from a static nonlinearity, which in turn allows identification to be performed for both parts independently. Validation results indicate that the model gives a reasonable representation of the studied plasma process.

Keywords

Langmuir probes; antennas in plasma; argon; fusion reactor design; oxygen; plasma flow; plasma nonlinear processes; Ar-O₂; Langmiur probe; argon flow; control-oriented model; experimental plasma reactor; model structure; optical diagnostics; oxygen flow; plasma process; static nonlinearity; water cooled copper antenna; Control design; Electric variables control; Etching; Inductors; Plasma applications; Plasma chemistry; Plasma density; Plasma materials processing; Power system modeling; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Technology (ICIT), 2010 IEEE International Conference on

Conference_Location

Vi a del Mar

Print_ISBN

978-1-4244-5695-6

Electronic_ISBN

978-1-4244-5696-3

Type

conf

DOI

10.1109/ICIT.2010.5472657

Filename

5472657