DocumentCode :
2471800
Title :
Measuring Thin Film Properties Using SAW Devices: Diffusivity and Surface Area
Author :
Martin, S.J. ; Frye, G.C. ; Ricco, A.J. ; Zipperian, T.E.
fYear :
1987
fDate :
14-16 Oct. 1987
Firstpage :
563
Lastpage :
568
Keywords :
Area measurement; Frequency; Gas detectors; Gases; Nitrogen; Polymer films; Pressure measurement; Surface acoustic wave devices; Surface acoustic waves; Thin film devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
Type :
conf
DOI :
10.1109/ULTSYM.1987.199020
Filename :
1535960
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2471800
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