Title :
Mass Sensitivity of Plate Modes in Surface Acoustic Wave Devices and their Potential as Chemical Sensors
Author :
Hou, Janpu ; van de Vaart, H.
Keywords :
Acoustic sensors; Acoustic waves; Chemical sensors; Delay lines; Gas detectors; Stress; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Temperature sensors;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.199022