Title :
CMOS-compatible waveguiding platform on bulk silicon
Author :
Sherwood-Droz, Nicolás ; Gondarenko, Alexander ; Lipson, Michal
Author_Institution :
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate a bulk silicon alternative to the conventional silicon-on-insulator photonics platform. We show waveguide losses of 10 dB/cm with a technique that can be implemented on the front-end of a typical CMOS fabrication line.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optics; optical fabrication; optical waveguides; silicon; CMOS fabrication line; CMOS-compatible waveguiding platform; Si; bulk silicon; high index-contrast photonics; integrated waveguides; optical waveguide fabrication; photonics integration; waveguide losses; Bonding; III-V semiconductor materials; Integrated optics; Optical buffering; Optical device fabrication; Optical losses; Optical modulation; Optical waveguides; Photonics; Silicon on insulator technology; CMOS integrated circuits; integrated optics; silicon on insulator technology; silicon photonics;
Conference_Titel :
Group IV Photonics, 2009. GFP '09. 6th IEEE International Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-4402-1
Electronic_ISBN :
1949-2081
DOI :
10.1109/GROUP4.2009.5338337
