Title :
7F-1 Design of Band-Stop Filters Using PZT Layer On Silicon Substrate Phononic Crystals
Author :
Hladky-Hennion, A.C. ; Vasseur, Jerome ; Dubus, B. ; Duval, Fabrice ; Morvan, B.
Author_Institution :
Inst. d´Electron. de Microelectronique et de Nanotechnologie, Lille
Abstract :
The realization of a stop-band filter constituted by a periodically patterned PZT layer, polarized along thickness, on silicon substrate and interdigitated electrodes (IDE) for emission/reception of guided elastic waves, is investigated. The filter characteristics are theoretically evaluated by using finite element simulations: dispersion curves of patterned PZT layer are computed for a given pattern geometry to obtain the absolute band gap. Complete structure is then modelled, with appropriate IDE to propagate a guided mode in the piezoelectric layer. Finally, filtering capability of the structure is evaluated.
Keywords :
band-stop filters; elastic waves; energy gap; finite element analysis; lead compounds; phononic crystals; piezoelectric materials; silicon; PZT layer; PZT-Si; band-stop filters; dispersion curve; filtering application; finite element simulation; guided elastic waves; interdigitated electrodes; pattern geometry; phononic crystals; piezoelectric layer; silicon substrate; Computational geometry; Computational modeling; Crystals; Electrodes; Filters; Finite element methods; Photonic band gap; Polarization; Silicon; Solid modeling;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.161
