• DocumentCode
    2472521
  • Title

    Prism coupling measurements of AlxGa1-xAs native oxides

  • Author

    Luo, Y. ; Kou, L. ; Wu, H. ; Hall, D.C. ; Blum, O. ; Hou, H.

  • Author_Institution
    Dept. of Electr. Eng., Notre Dame Univ., IN, USA
  • Volume
    2
  • fYear
    1998
  • fDate
    3-4 Dec 1998
  • Firstpage
    240
  • Abstract
    We have presented various results from prism coupling measurements on AlGaAs native oxides. We have observed a strong index variation with Al composition which is suitable for the formation of all-oxide planar waveguides. An unexpected decrease in the oxidation activation energy is observed
  • Keywords
    III-V semiconductors; aluminium compounds; gallium arsenide; optical planar waveguides; optical prisms; optical testing; Al composition; AlxGa1-xAs native oxides; AlGaAs; all-oxide planar waveguides; oxidation activation energy; prism coupling measurements; strong index variation; Artificial intelligence; Chemical analysis; Electric variables measurement; Laboratories; Optical films; Oxidation; Phase change materials; Probes; Semiconductor waveguides; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
  • Conference_Location
    Orlando, FL
  • Print_ISBN
    0-7803-4947-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1998.739548
  • Filename
    739548
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2472521