Title :
Dose uniformity of a compact beamline in routine operation with a storage ring "AURORA-2S"
Author :
Hirose, S. ; Amano, D. ; Miyatake, T. ; Xan Li ; Hori, T.
Author_Institution :
Res. & Dev. Center, Sumitomo Heavy Ind. Ltd., Tokyo, Japan
Abstract :
In 1998, we developed a short beamline with high brightness for x-ray lithography. In 1999, the beamline which is installed in our Tanashi-plan has achieved a dose uniformity better than /spl plusmn/5 % with an exposure intensity over 60 mW/cm/sup 2/ using a synchrotron radiation (SR) beam from a storage ring "AURORA-2S (A2S)". In routine operation, the position of SR beam moves in a range of 0.15 mm in horizontal direction and 0.1 mm in vertical direction. The beam profile varies from round shape to oval shape with an operation parameter. In this paper, we describe the impact of both the beam profile and beam position stability on dose uniformity of the beamline.
Keywords :
X-ray apparatus; X-ray lithography; storage rings; synchrotron radiation; AURORA-2S storage ring; Tanashi plan; X-ray lithography; beamline; brightness; dose uniformity; synchrotron radiation beam; Brightness; Charge measurement; Charge-coupled image sensors; Current measurement; Shape; Stability; Storage rings; Strontium; Synchrotron radiation; X-ray lithography;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-004-6
DOI :
10.1109/IMNC.2000.872625
