Title :
Rib waveguide to strip waveguide mode converter using local oxidation of silicon (LOCOS)
Author :
Spector, S.J. ; Swint, R.B.
Author_Institution :
Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA
Abstract :
A mode converter that goes from a rib waveguide to a strip waveguide has been demonstrated. The mode converter contains a 3-D taper fabricated using LOCOS. The demonstrated losses are 0.34 dB per coupler.
Keywords :
integrated optics; optical couplers; optical fabrication; optical losses; optical waveguides; oxidation; rib waveguides; 3D taper; LOCOS; Si; local oxidation of silicon; mode converter; optical coupler; optical losses; rib waveguide; strip waveguide; Etching; Fabrication; III-V semiconductor materials; Lithography; Oxidation; Photonics; Shape control; Silicon; Strips; Waveguide transitions;
Conference_Titel :
Group IV Photonics, 2009. GFP '09. 6th IEEE International Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-4402-1
Electronic_ISBN :
1949-2081
DOI :
10.1109/GROUP4.2009.5338353
