Athermal wavelength property of Si-slot ring resonator embedded with benzocyclobutene

Author

Atsumi, Yuki ; Nishiyama, Nobuhiko ; Enomoto, Haruki ; Inoue, Keita ; Arai, Shigehisa

Author_Institution

Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan

fYear

2009

fDate

9-11 Sept. 2009

Firstpage

80

Lastpage

82

Abstract

An athermal silicon-slot-waveguide ring resonator embedded with benzocyclobutene (BCB), which is low-k material for electronics, was proposed and demonstrated. The temperature dependence of the drop wavelengths as small as -0.6 pm/K was achieved.

Keywords

elemental semiconductors; integrated optics; optical resonators; optical waveguides; organic compounds; silicon; thermo-optical effects; athermal silicon-slot-waveguide ring resonator; athermal wavelength property; benzocyclobutene; drop wavelengths; low-k material; silicon-slot ring resonator; Circuits; Large scale integration; Nonlinear optics; Optical filters; Optical refraction; Optical ring resonators; Optical variables control; Optical waveguides; Temperature dependence; Wavelength division multiplexing; Benzocyclobutene; Si photonics; athermal wavelengtrh property; ring resonator; slot waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

Group IV Photonics, 2009. GFP '09. 6th IEEE International Conference on

Conference_Location

San Francisco, CA

ISSN

1949-2081

Print_ISBN

978-1-4244-4402-1

Electronic_ISBN

1949-2081

Type

conf

DOI

10.1109/GROUP4.2009.5338356

Filename

5338356