Title :
A silicon-based electrical source for surface plasmon polaritons
Author :
Walters, Robert J. ; Van Loon, Rob V A ; Brunets, Ihor ; Schmitz, Jurriaan ; Polman, Albert
Author_Institution :
Center for Nanophotonics, FOM Inst. for Atomic & Mol. Phys., Amsterdam, Netherlands
Abstract :
This work demonstrates the fabrication of a silicon-based electrical source for surface plasmon polaritons (SPPs) at low temperatures using silicon nanocrystal doped alumina within a metal-insulator-metal (MIM) waveguide geometry. The fabrication method uses established microtechnology processes that are compatible with backend CMOS technology. The fabricated device suggests a route forward towards high density, active plasmonic circuits that are integrated with silicon microelectronics.
Keywords :
MIM devices; alumina; elemental semiconductors; integrated optics; integrated optoelectronics; nanostructured materials; optical waveguides; polaritons; silicon; surface plasmons; Si:Al2O3; active plasmonic circuits; alumina-doped silicon nanocrystal; backend CMOS technology; high density circuits; integrated silicon microelectronics; low temperature fabrication; metal-insulator-metal waveguide geometry; microtechnology processes; silicon-based electrical source; surface plasmon polaritons; CMOS process; CMOS technology; Geometry; Metal-insulator structures; Nanocrystals; Optical device fabrication; Plasmons; Silicon; Surface waves; Temperature;
Conference_Titel :
Group IV Photonics, 2009. GFP '09. 6th IEEE International Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-4402-1
Electronic_ISBN :
1949-2081
DOI :
10.1109/GROUP4.2009.5338358
