Title :
Effect of Higher Modes of a Layered Substrate on V(Z) in Acoustic Microscopy
Author :
Chan, K.H. ; Bertoni, H.L. ; Davids, D.A.
Keywords :
Acoustic measurements; Acoustic propagation; Acoustic waves; Attenuation; Mechanical factors; Optical microscopy; Phase estimation; Reflection; Substrates; Voltage;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.199068
