Title :
Fabrication of new electrostatic linear actuator
Author :
Matsunaga, T. ; Kondoh, K. ; Kumagae, M. ; Kawara, H. ; Yasuda, M. ; Murata, K.
Author_Institution :
Dept. of Phys. & Electron., Osaka Prefecture Univ., Japan
Abstract :
It is hard to construct an actuator which has a large stroke in one direction. In this paper, we propose a new electrostatic linear actuator which has 500 /spl mu/m stroke. A novel process is developed for fabricating the actuator at low temperatures up to 110/spl deg/C through the entire process. We also simulate the electrostatic forces in this actuator.
Keywords :
electrostatic actuators; electrostatic linear actuator; fabrication; Electrodes; Electrostatic actuators; Fabrication; Hydraulic actuators; Resists; Substrates; Switches; Teeth; Temperature; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-004-6
DOI :
10.1109/IMNC.2000.872634
