Title :
8E-2 Accurate FEM/BEM Modeling of SAW Devices Coated with Dielectric Layers
Author :
Kawaguchi, Masaya ; Fukuura, Atsuomi
Author_Institution :
Kyocera Corp., Kagoshima
Abstract :
FEM/BEM analysis technique, which is capable of analyzing SAW devices with dielectric coating layers, is presented. The resulting technique is based on the conventional Green function rather than its inverse. FEM part of the analysis deals with the free space region, dielectric layers, electrodes, and part of the substrate. Two approaches to treat the semi-infinite free space above the device structure are proposed. Numerical results are given for the frequency shift of SAW filters caused by SiO2 coating layer, and good agreement with experiments is observed.
Keywords :
acoustic wave propagation; boundary-elements methods; coatings; finite element analysis; surface acoustic wave filters; BEM modeling; FEM modeling; Green function; SAW devices; SAW filters; boundary elements method; dielectric coating layers; fiite element method; surface acoustic wave devices; Coatings; Dielectric devices; Dielectric substrates; Electrodes; Frequency; Green function; Passivation; Research and development; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.180
