Title :
Performance of "AURORA-2S" [for X-ray lithography]
Author_Institution :
Res. & Dev. Center, Sumitomo Heavy Ind. Ltd., Tokyo, Japan
Abstract :
The AURORA-2S (A2S) SR ring is designed for X-ray lithography. The current status of A2S is shown including the results of commissioning and long-term running. The outstanding feature of A2S lies in normal-conducting 180/spl deg/ bending magnets to generate 2.7 T, where the stored beam of 700 MeV circulates at a radius of 0.87 m. A2S is designed to produce quite uniform SR for every direction in the bending magnets. Simplified operation and maintenance procedures other key factors for commercial use, which has successfully achieved by eliminating superconducting technology from the system.
Keywords :
X-ray apparatus; X-ray lithography; X-ray production; accelerator magnets; commissioning; storage rings; synchrotron radiation; 2.7 T; 500 mA; 700 MeV; AURORA-2S; SR ring; X-ray lithography; bending magnets; commissioning; dose uniformity; long-term running; self-shielding; simplified maintenance; simplified operation; uniform SR; Acceleration; Constitution; Light sources; Particle beams; Research and development; Strontium; Superconducting magnets; Synchrotrons; Undulators; X-ray lithography;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-004-6
DOI :
10.1109/IMNC.2000.872647
