Title :
Design and fabrication of magnetically driven micromirror with large angular deflection
Author :
Chang Hyeon Ji ; Yong-Kweon Kim
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
In this research we have designed and fabricated electromagnetically driven micromirror by combination of surface and bulk micromachining processes. Individual mirror plate and springs occupy relatively small area of 300/spl times/300 /spl mu/m/sup 2/. To obtain flat mirror surface, bulk silicon of thickness ranging from 10 to 20 /spl mu/m is used as a mirror plate. For the mirror plate to have substantial amount of angular deflection, aluminum is used as a spring material and crab-leg shaped spring is used.
Keywords :
micro-optics; microactuators; micromachining; mirrors; optical fabrication; Si; aluminum spring; angular deflection; bulk micromachining; magnetic actuation; micromirror; surface micromachining; Etching; Fabrication; Magnetic materials; Micromirrors; Mirrors; Nickel; Rough surfaces; Silicon; Springs; Surface roughness;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-004-6
DOI :
10.1109/IMNC.2000.872657
