Title :
A surface-bulk micromachined electromagnetic gyroscope operating at atmospheric pressure
Author :
Kim, Seong-Hyok ; Kim, Yong-Kweon ; Song, Jin-Woo ; Lee, Jang-Gyu
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
This paper reports an electrostatically driven and electromagnetically sensed planar vibratory gyroscope. The fabrication process is based on a surface-bulk combined micromachining, and the fabricated gyroscope can be operated at atmospheric pressure with good output characteristics.
Keywords :
electromagnetic devices; gyroscopes; micromachining; microsensors; MEMS technology; atmospheric pressure; bulk micromachining; electromagnetic sensing; electrostatic driving; fabrication; planar vibratory gyroscope; surface micromachining; Actuators; Anisotropic magnetoresistance; Coils; Etching; Fabrication; Gyroscopes; Micromachining; Silicon; Springs; Transducers;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-004-6
DOI :
10.1109/IMNC.2000.872668
