Title :
MPACVD planar waveguide devices with fiber attachment for integrated optic applications
Author :
Li, Cheng-chung ; Bondreau, R. ; Bowen, Terry
Author_Institution :
Global Optoelectron. Product Technol., AMP Inc., Harrisburg, PA, USA
Abstract :
Optical circuits based on low-loss glass waveguide are a practical and promising approach to integrating different functional components for optical communication systems. Microwave plasma assisted chemical vapor deposition (MPACVD) produces superior quality, low birefringence, low-loss, planar waveguides for integrated optical devices. Fiber attachment technologies provide capability to produce low cost components for practical applications
Keywords :
birefringence; integrated optoelectronics; optical communication equipment; optical fabrication; optical losses; optical planar waveguides; plasma CVD; MPACVD planar waveguide devices; fiber attachment; fiber attachment technologies; functional components; integrated optic applications; integrated optical devices; low birefringence; low cost component; low-loss glass waveguide; low-loss planar waveguides; microwave plasma assisted chemical vapor deposition; optical circuits; optical communication systems; plasma assisted CVD; Circuits; Glass; Integrated optics; Optical devices; Optical fiber communication; Optical fiber devices; Optical planar waveguides; Optical waveguide components; Optical waveguides; Planar waveguides;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.739715
