Title :
Compact imprint system using driving power of stepping motor
Author :
Igaku, Y. ; Matsui, S. ; Ishigaki, H. ; Hiroshima, H. ; Komuro, M. ; Yamanaka, S. ; Nagamura, T.
Author_Institution :
Himeji Inst. of Technol., Hyogo, Japan
Abstract :
In this paper, we report on a newly developed step-and-repeat nano-imprint-lithography (NIL) system using driving power of stepping motor which has advantages that the system size is small and the precise control is possible by using a stepping motor instead of a hydraulic press. We have developed a compact imprint lithography system and demonstrated replication of 1 /spl mu/m patterns as preliminary experiment. Nanometer patterns and details of several key operating parameters will be discussed.
Keywords :
lithography; nanotechnology; stepping motors; compact imprint lithography; driving power; nanofabrication; pattern replication; step-and-repeat nano-imprint-lithography system; stepping motor; Dry etching; Electron beams; Glass; Laboratories; Lithography; Nanofabrication; Nanoscale devices; Resists; Shape; Temperature;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-004-6
DOI :
10.1109/IMNC.2000.872697
