10D-6 A PZT/Si Composite Transducer for Resonant Ultrasound Spectroscope

In this paper, a PZT/Si composite transducer for resonant ultrasound spectroscope (RUS) is proposed, designed and fabricated. This composite transducer is made of a PZT piezoelectric disk, where a tiny silicon piece is adhered in its centre. For the silicon piece, a pyramid pit is fabricated by using MEMS technology. By using this composite transducer with a central pyramid pit, the tested sample is easily mounted to RUS measurement stage and measurement accuracy can be improved. In the paper, we study the electrostriction displacement of composite transducer used as ultrasonic transmitter and static displacement of composite transducer used as ultrasonic receiver in RUS, and compare them with those of single PZT plate transducer. The results show that the actuation ability or sensitivity of composite transducer decreases only by 4% in our design and can be used in RUS measurement.