Title :
Nondestructive Observation of Microdefects in In-Doped-GaAs by Photo-Thermal-Radiation Microscope
Author :
Mikoshiba, N. ; Tsubouchi, K. ; Akutsu, Y.
Keywords :
Acoustic beams; Gallium arsenide; Infrared detectors; Microscopy; Radiation detectors; Silicon radiation detectors; Surface emitting lasers; Surface topography; Temperature sensors; Wavelength measurement;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.199142