• DocumentCode
    2474968
  • Title

    Imprinting characteristics by photo-induced solidification of liquid polymer

  • Author

    Komuro, M. ; Taniguchi, J. ; Tokano, Y. ; Inoue, S. ; Kimura, N. ; Hiroshima, H. ; Matsui, S.

  • Author_Institution
    Electrotech. Lab., Japan
  • fYear
    2000
  • fDate
    11-13 July 2000
  • Firstpage
    294
  • Lastpage
    295
  • Abstract
    Imprinting lithography is the most promising technology in terms of mass-production and low-cost of equipment, but thermal cycle above the glass transition temperature (more than 100/spl deg/C) will worsen positional accuracy in stitching and overlay of patterns. In this paper, we describe the imprinting process using liquid polymer, which is solidified with Ultra-violet (UV) light exposure.
  • Keywords
    lithography; polymers; solidification; ultraviolet radiation effects; imprinting lithography; liquid polymer; photo-induced solidification; ultraviolet light exposure; Etching; Glass; Heating; Large scale integration; Lithography; Polymer films; Resists; Silicon; Temperature; Thermal resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2000 International
  • Conference_Location
    Tokyo, Japan
  • Print_ISBN
    4-89114-004-6
  • Type

    conf

  • DOI
    10.1109/IMNC.2000.872771
  • Filename
    872771
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2474968